MEMS/NEMS handbook : techniques and applications /
MEMS/NEMS handbook : techniques and applications /
edited by Cornelius T. Leondes
- New York : Springer, 2006
- 5v. : ill. ; 25 cm.
v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS
0387245200 (set)
Microelectromechanical systems--Design and construction
Nanotechnology
v. 1. Design methods -- v. 2. Fabrication techniques -- v. 3. Manufacturing methods -- v. 4. Sensors and actuators -- v. 5. Medical applications and MOEMS
0387245200 (set)
Microelectromechanical systems--Design and construction
Nanotechnology