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Handbook of optical metrology : principles and applications /

Handbook of optical metrology : principles and applications / edited by Toru Yoshizawa - 2nd ed. - Boca Raton : CRC Press, 2015 - xiii, 905 p. : ill. ; 26 cm.

Includes bibliographical references and index

ISBN: 9781466573598

Subjects--Topical Terms:
Optical measurements--Handbooks, manuals, etc.
Metrology--Handbooks, manuals, etc.

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