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Microsystems technology and microrobotics /

Fatikow, S. ((Sergej)) 1960-

Microsystems technology and microrobotics / S. Fatikow, U. Rembold - Berlin: New York: Springer, 1997 - xii, 408 p.: ill.; 24 cm.

Includes bibliographical references (p. [366]-401) and index

ISBN: 3540606580

Subjects--Topical Terms:
Electromechanical devices--Design and construction
Microfabrication
Robotics

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