Foundations of MEMS /
Liu, Chang
Foundations of MEMS / Chang Liu - 2nd ed. - Upper Saddle River, N.J. : Prentice Hall, c2012 - xiv, 562 p. : ill. ; 24 cm.
Includes bibliographical references and index
9780132497367 (alk. paper) 0132497360 (alk. paper)
Microelectromechanical systems
Foundations of MEMS / Chang Liu - 2nd ed. - Upper Saddle River, N.J. : Prentice Hall, c2012 - xiv, 562 p. : ill. ; 24 cm.
Includes bibliographical references and index
9780132497367 (alk. paper) 0132497360 (alk. paper)
Microelectromechanical systems