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SIMOX /

SIMOX / edited by Maria J. Anc - London : Institution of Electrical Engineers, 2004 - xvi, 143 p. : ill. ; 26 cm. - Processing series; no. 4 . - Processing series; no. 4 .

Includes bibliographical references and index

ISBN: 086341334X 9780863413346

Subjects--Topical Terms:
Silicon-on-insulator technology

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