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Micro process engineering : fundamentals, devices, fabrication, and applications /

Micro process engineering : fundamentals, devices, fabrication, and applications / volume editor : Norbert Kockmann - Weinheim : Wiley-VCH , c2006 - xxii, 507 p. : ill. ; 24 cm. - Advanced micro & nanosystems ; 5 .

Includes bibliographical references and index

ISBN: 3527312463

Subjects--Topical Terms:
Production engineering
Microtechnology

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