MEMS and NEMS : systems, devices, and structures /
Lyshevski, Sergey Edward
MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski - Boca Raton : CRC Press, 2002 - 461 p. : ill. ; 24 cm - Nano- and microscience, engineering, technology, and medicine series .
0849312620
Microelectromechanical systems
MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski - Boca Raton : CRC Press, 2002 - 461 p. : ill. ; 24 cm - Nano- and microscience, engineering, technology, and medicine series .
0849312620
Microelectromechanical systems