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Micro electro mechanical system design /

Allen, James J.

Micro electro mechanical system design / James J. Allen - Boca Raton : Taylor & Francis, 2005 - 465 p. : ill. ; 23 cm. - Mechanical engineering .

ISBN: 0824758242

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction
Engineering design

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