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MEMS : design and fabrication /

MEMS : design and fabrication / edited by Mohamed Gad-el-Hak - 2nd ed. - Boca Raton : Taylor & Francis, 2006 - (various pagings) : ill. ; 26 cm. - Mechanical engineering series .

ISBN: 0849391385

Subjects--Topical Terms:
Microelectromechanical systems
Microfabrication

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