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Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method /

Dayangku Noorfazidah Awang Sh'ri

Effect of surface pretreatments on the deposition of polycrystalline diamond on silicon nitride substrates using hot filament chemical vapor deposition method / Dayangku Noorfazidah Awang Sh'ri - [Skudai, Johor] : UTM, 2009 - xvii, 109 p. : ill. ; 30 cm.

Thesis (Master of Engineering (Mechanical-Materials) -- Universiti Teknologi Malaysia - 2009

Bibliography : p. 101-106

ISBN: THE0005770(Local)

Subjects--Topical Terms:
Surfaces (Technology)
Diamond thin films
Chemical vapor deposition

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