Silicide technology for integrated circuits /
Silicide technology for integrated circuits /
edited by Lih J. Chen
- London : Instiyution of Electrical Engineers, 2004
- 279 p. : ill. ; 26 cm.
- IEE processing series ; 5 .
0863413528
Silicides
Integrated circuits--Materials
0863413528
Silicides
Integrated circuits--Materials