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Microengineering, MEMs, and interfacing : a practical training /

Banks, Danny

Microengineering, MEMs, and interfacing : a practical training / Danny Banks - Boca Raton : Taylor & Francis, 2006 - 326 p. : ill. ; 24 cm. - Mechanical engineering ; 199 .

ISBN: 0824723058

Subjects--Topical Terms:
Microelectromechanical systems

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