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Microsystems technology : fabrication, test & reliability / edited by Jumana Boussey

Microsystems technology : fabrication, test & reliability / edited by Jumana Boussey - Sterling, VA : Kogan Page Science, 2003 - 295 p. : ill. ; 25 cm.

ISBN: 1903996473

Subjects--Topical Terms:
Microelectromechanical systems

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