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Microfabrication and nanomanufacturing /

Microfabrication and nanomanufacturing / edited by Mark J. Jackson. - Boca Raton, FL : CRC/Taylor & Francis, 2006 - 401 p. : ill. ; 27 cm.

Includes bibliographical references and index

ISBN: 0824724313 (hbk.)

Subjects--Topical Terms:
Microelectronics
Integrated circuits--Design and construction
Microelectromechanical systems--Design and construction

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