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Smart sensors and MEMS /

Smart sensors and MEMS / edited by Sergey Y. Yurish and Maria Teresa S.R. Gomes - Dordrecht : Kluwer Academic, 2004 - 480 p. : ill., ports. ; 25 cm.

ISBN: 1402029284

Subjects--Topical Terms:
Detectors
Microelectromechanical systems
Scanning systems

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