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CMOS hotplate chemical microsensors /

CMOS hotplate chemical microsensors / M. Graf ... [et al.] - Berlin ; New York : Springer, c2007 - xii, 125 p. : ill. (some col.) ; 24 cm. - Microtechnology and MEMS .

Includes bibliographical references (p. 113-121) and index

ISBN: 9783540695615

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction
Microfabrication

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