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Advances in micro/nano electromechanical systems and fabrication technologies /

Advances in micro/nano electromechanical systems and fabrication technologies / edited by Kenichi Takahata - Rijeka, Croatia : INTECH, 2014 - vi, 226 p. : ill. ; 23 cm.

Includes bibliographical references

ISBN: 9789535110859

Subjects--Topical Terms:
Fabrication
Manufacturing processes

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