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MEMS technology and devices : Suntec, Singapore, 1-6 July 2007 /

MEMS technology and devices : Suntec, Singapore, 1-6 July 2007 / MEMS technology and devices Suntec, Singapore, 1-6 July 2007 [computer file]: Aiqun Liu ... [et al.] - Singapore : Hackensack, NJ : Pan Stanford Pub. ; Distributed by World Scientific Pub. Co., c2007. - xv, 441 p. : ill. ; 24 cm. + 1 computer disc

"ICMAT 2007 conference proceedings"--T.p. verso

Includes bibliographical references

ISBN: 9789812709608 (hbk.) 9812709606 (hbk.)

Subjects--Topical Terms:
Microelectromechanical systems--Congresses
Nanostructured materials--Congresses

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