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MEMS /

Mahalik, Nitaigour Premchand

MEMS / Nitaigour Premchand Mahalik - New York : McGraw-Hill , 2008 - 500 p. : ill. ; 25 cm.

ISBN: 0070634459 9780070634459

Subjects--Topical Terms:
Microelectromechanical systems
Microelectronics
Nanotechnology

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