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Plasma nanoscience : basic concepts and applications of deterministic nanofabrication /

Ostrikov, Kostya

Plasma nanoscience : basic concepts and applications of deterministic nanofabrication / Kostya Ostrikov - Weinheim : Wiley-VCH, 2008 - 538 p. : ill. ; 25 cm.

ISBN: 3527407405 9783527407408

Subjects--Topical Terms:
Nanostructured materials
Plasma engineering
Low temperature plasmas

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