Surfaces, interfaces, and thin films for microelectronics /
Irene, Eugene A.
Surfaces, interfaces, and thin films for microelectronics / Eugene A. Irene. - Hoboken, N.J. : Wiley-Interscience, c2008. - xiii, 515 p. : ill. ; 25 cm.
Includes bibliographical references and index.
0470174471 (cloth) 9780470174470 (cloth)
Surface chemistry.
Interfaces (Physical sciences)
Thin films.
Microelectronics--Materials.
Surfaces, interfaces, and thin films for microelectronics / Eugene A. Irene. - Hoboken, N.J. : Wiley-Interscience, c2008. - xiii, 515 p. : ill. ; 25 cm.
Includes bibliographical references and index.
0470174471 (cloth) 9780470174470 (cloth)
Surface chemistry.
Interfaces (Physical sciences)
Thin films.
Microelectronics--Materials.