Introduction to microsystem technology : a guide for students /
Gerlach, Gerald.
Introduction to microsystem technology : a guide for students / Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller. - Chichester, England ; Hoboken, NJ : J. Wiley & Sons, c2008. - xxiii, 351 p. : ill. ; 26 cm. - Wiley microsystem and nanotechnology series .
Includes bibliographical references and index.
Translated from the German.
0470058617 (cloth) 9780470058619 (cloth)
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.
Introduction to microsystem technology : a guide for students / Gerald Gerlach, Wolfram Dötzel ; translated by Dörte Müller. - Chichester, England ; Hoboken, NJ : J. Wiley & Sons, c2008. - xxiii, 351 p. : ill. ; 26 cm. - Wiley microsystem and nanotechnology series .
Includes bibliographical references and index.
Translated from the German.
0470058617 (cloth) 9780470058619 (cloth)
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.