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Ion implantation and synthesis of materials /

Nastasi, Michael Anthony

Ion implantation and synthesis of materials / M. Nastasi, J.W. Mayer - Berlin ; New York : Springer-Verlag, c2006 - xiii, 263 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 3540236740 9783540236740

Subjects--Topical Terms:
Ion implantation

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