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Atomic layer deposition of nanostructured materials /

Atomic layer deposition of nanostructured materials / edited by Nicola Pinna, Mato Knez - Weinheim, GER : Wiley-VCH, 2012 - xxxvi, 435 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9783527327973 3527327975

Subjects--Topical Terms:
Chemical vapor deposition
Nanostructured materials

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