Materials modification by energetic atoms and ions : Symposium held April 28-30, 1992, San Francisco, California, USA /
Materials modification by energetic atoms and ions : Symposium held April 28-30, 1992, San Francisco, California, USA /
editors by Kenneth S. Grabowski ... [et al.]
- Pittsburgh, PA : Materials Research Society, c1992
- xiii, 405 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 268 .
Includes bibliographical references and index
9781558991637 1558991638
Semiconductors--Etching--Congresses
Plasma etching--Congresses
Ion bombardment--Congresses
Thin films--Congresses
Includes bibliographical references and index
9781558991637 1558991638
Semiconductors--Etching--Congresses
Plasma etching--Congresses
Ion bombardment--Congresses
Thin films--Congresses