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Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A. /

Ion beam processes in advanced electronic materials and device technology : symposium held April 15-18, 1985, San Francisco, California, U.S.A. / editors, B. R. Appleton, F. H. Eisen, T. W. Sigmon - Pittsburgh, PA : Materials Research Society, c1985 - xv, 393 p. : ill. ; 24 cm. - Materials Research Society symposia proceedings ; v. 45 . - Materials Research Society symposia proceedings .

Includes bibliographies references and index

ISBN: 9780931837104

Subjects--Topical Terms:
Semiconductors--Congresses
Ion implantation--Congresses

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