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Advanced nanoscale ULSI interconnects : fundamentals and applications /

Advanced nanoscale ULSI interconnects : fundamentals and applications / edited by Yosi Shacham-Diamand ... [et al.] - New York : Springer, 2009 - xx, 537 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9780387958675 0387958673

Subjects--Topical Terms:
Integrated circuits--Ultra large scale integration
Nanoelectromechanical systems

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