Nanofabrication : fundamentals and applications /

Nanofabrication : fundamentals and applications / edited by Ampere A. Tseng - New Jersey : World Scientific , 2008 - viii, 574 p. : ill. (some col.) ; 26 cm.

Includes bibliographical references and index

9789812700766 9812700765


Nanostructured materials
Nanostructures
Scanning probe microscopy
Lithography, Electron beam

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