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Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A. /

Advanced interconnects and contacts : symposium held April 5-7, 1999, San Francisco, California, U.S.A. / editors, Daniel C. Edelstein ... [et al.] - Warrendale, Pa. : Materials Research Society, c1999 - xiv, 577 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 564 . - Materials Research Society symposia proceedings ; v. 564 .

Includes bibliographical references and indexes

ISBN: 9781558994713 1558994718

Subjects--Topical Terms:
Semiconductors--Junctions--Congresses
Silicides--Congresses
Semiconductor-metal boundaries--Congresses
Metallic films--Congresses

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