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Digital holography for MEMS and microsystem metrology /

Digital holography for MEMS and microsystem metrology / edited by Anand Asundi - Chichester, West Sussex, UK : Wiley, 2011 - xxii, 205 p. : ill. ; 25 cm. - Wiley microsystem and nanotechnology series .

Includes bibliographical references and index

ISBN: 9780470978696

Subjects--Topical Terms:
Microelectromechanical systems--Measurement
Microelectronics--Measurement
Holographic testing
Image processing--Digital techniques

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