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Micro- and nanosystems--materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. /

Micro- and nanosystems--materials and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A. / editors: Cengiz S. Ozkan ... [et al.] - Warrendale, PA : Materials Research Society, 2005 - xv, 525 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 872 . - Materials Research Society symposia proceedings ; v. 872 .

Includes bibliographical references and indexes

ISBN: 9781558998261 1558998268

Subjects--Topical Terms:
Microelectromechanical systems--Congresses
Nanotechnology--Congresses

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