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Introduction to vacuum technology /

Hata, David M.

Introduction to vacuum technology / David Hata - Upper Saddle River, N.J. : Pearson Prentice Hall, c2008 - vii, 187 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9780130450180 (pbk.) 0130450189 (pbk.)

Subjects--Topical Terms:
Vacuum technology

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