Introduction to microfabrication /
Franssila, Sami
Introduction to microfabrication / Sami Franssila - 2nd ed. - Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010 - [xv], 518 p. : ill. ; 25 cm.
Includes index
9780470749838 (cloth)
Microelectromechanical systems
Electronic apparatus and appliances
Microfabrication
Introduction to microfabrication / Sami Franssila - 2nd ed. - Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010 - [xv], 518 p. : ill. ; 25 cm.
Includes index
9780470749838 (cloth)
Microelectromechanical systems
Electronic apparatus and appliances
Microfabrication