Introduction to microfabrication /

Franssila, Sami

Introduction to microfabrication / Sami Franssila - 2nd ed. - Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010 - [xv], 518 p. : ill. ; 25 cm.

Includes index

9780470749838 (cloth)


Microelectromechanical systems
Electronic apparatus and appliances
Microfabrication

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