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Feedback control of MEMS to atoms /

Feedback control of MEMS to atoms / editors by Jason J. Gorman, Benjamin Shapiro - New York : Springer, c2012 - viii, 384 p. : ill. ; 25 cm.

Includes bibliographical references and index

ISBN: 9781441958310

Subjects--Topical Terms:
Feedback control systems
Microelectromechanical systems
Microelectronics

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