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Micromachining using electrochemical discharge phenomenon : fundamentals and applications of spark assisted chemical engraving /

Wüthrich, Rolf

Micromachining using electrochemical discharge phenomenon : fundamentals and applications of spark assisted chemical engraving / Rolf Wüthrich - Oxford, UK : William Andrew, c2009 - xiv, 181 p. : ill. ; 27 cm. - Micro & nano technologies ; 6 . - Micro & nano technologies ; 6 .

Includes bibliographical references (p. 167-172) and index

ISBN: 9780815515876 0815515871

Subjects--Topical Terms:
Micromachining
Electrochemical cutting
Electric discharges--Industrial applications
Plasma etching

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