Nano-and micro-electromechanical systems : fundamentals of nano- and microengineering /
Lyshevski, Sergey Edward
Nano-and micro-electromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - 2nd ed. - Boca Raton, Florida : CRC Press, 2005 - 722 p. : ill. ; 26 cm - Nano- and microscience, engineering, technology, and medicine series .
0849328381
Microelectromechanical systems
Nanotechnology
Nano-and micro-electromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - 2nd ed. - Boca Raton, Florida : CRC Press, 2005 - 722 p. : ill. ; 26 cm - Nano- and microscience, engineering, technology, and medicine series .
0849328381
Microelectromechanical systems
Nanotechnology