Into the nano era /
Into the nano era /
Howard Huff, editor
- Berlin : Springer, c2009
- xxviii, 343 p. : ill. ; 24 cm.
- Springer series in materials science ; 106 .
Includes bibliographical references and index
9783540745587
Integrated circuits--History
Silicon--Electric properties
Semiconductors--Materials
Includes bibliographical references and index
9783540745587
Integrated circuits--History
Silicon--Electric properties
Semiconductors--Materials