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Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range /

Nanoscale calibration standards and methods : dimensional and related measurements in the micro- and nanometer range / edited by Gunter Wilkening, Ludger Koenders - Weinheim, Germany : Wiley-VCH, 2005 - xxii, 518 p. : ill. ; 25 cm.

Includes bibliographical references and index

ISBN: 352740502X

Subjects--Topical Terms:
Nanotechnology

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