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Silicon technologies : ion implantation and thermal treatment /

Silicon technologies : ion implantation and thermal treatment / edited by Annie Baudrant - London : Wiley, 2011 - xvii, 337 p. : ill. ; 24 cm.

Includes bibliographical references and index

ISBN: 9781848212312 1848212313

Subjects--Topical Terms:
Semiconductor doping
Ion implantation
Semiconductors--Heat treatment

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