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In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A. /

In situ process diagnostics and modelling : symposium held April 6-7, 1999, San Francisco, California, U.S.A. / editors by Orlando Auciello ... [et al.] - Warrendale, PA : Materials Research Society, c1999 - xi, 199 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 569 . - Materials Research Society symposium proceedings .

Includes bibliographical references and index

ISBN: 9781558994768 1558994769

Subjects--Topical Terms:
Thin film devices--Design and construction--Congresses
Plasma diagnostics--Congresses
Lasers--Industrial applications--Congresses

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