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MEMS and nanotechnology. proceedings of the 2011 annual conference on experimental and applied mechanics / Vol. 4 :

MEMS and nanotechnology. proceedings of the 2011 annual conference on experimental and applied mechanics / Vol. 4 : Tom Proulx, editor - New York : Springer, c2011 - viii, 191 p. : ill. ; 29 cm. - Conference proceedings of the society for experimental mechanics series . - Conference proceedings of the society for experimental mechanics series .

Includes bibliographical references

ISBN: 9781461402091

Subjects--Topical Terms:
Microelectromechanical systems--Congresses
Nanotechnology--Congresses

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