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Photons and low energy particles in surface processing : symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. /

Photons and low energy particles in surface processing : symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. / editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang - Pittsburgh, Pa. : Materials Research Society, 1992 - xv, 552 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings, v. 236 0272-9172 ; . - Materials Research Society symposium proceedings ; v. 236 .

Includes bibliographical references and index

ISBN: 9781558991309 1558991301

Subjects--Topical Terms:
Surfaces (Technology)--Congresses
Plasma etching--Congresses
Lasers--Industrial applications--Congresses
Photon beams--Industrial applications--Congresses
Plasma-enhanced chemical vapor deposition--Congresses

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