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MEMS materials and processes handbook /

MEMS materials and processes handbook / editors by Reza Ghodssi, Pinyen Lin - New York ; London : Springer, c2011 - xxxv, 1187 p. : ill. ; 24 cm. - MEMS reference shelf . - MEMS reference shelf .

Includes bibliographical references and index

ISBN: 9780387473161 0387473165

Subjects--Topical Terms:
Microelectromechanical systems--Materials
Microelectromechanical systems

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