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Advanced Metallization Conference 2003 (AMC 2003) : proceedings of the conference held October 21-23, 2003, in Montreal, Canada, and September 29-October 1, 2003 University of Tokyo, Tokyo, Japan. This Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. /

Advanced Metallization Conference 2003 (AMC 2003) : proceedings of the conference held October 21-23, 2003, in Montreal, Canada, and September 29-October 1, 2003 University of Tokyo, Tokyo, Japan. This Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A. / AMC 2003 editors, Gary W. Ray ... [et al] - Warrendale, Pa. : Materials Research Society, c2004 - xxiii, 792 p. : ill. ; 24 cm. - Materials Research Society conference proceedings 1048-0854 . - Materials Research Society conference proceedings .

Includes bibliographical references and indexes

ISBN: 9781558997578 1558997571

Subjects--Topical Terms:
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses