Advanced Metallization Conference 2006 (AMC 2006) : proceedings ... of ... the conferences held October 17-19, 2006, in San Diego, California, U.S.A. and September 26-27, 2006, at the University of Tokyo, Tokyo, Japan /
Advanced Metallization Conference 2006 (AMC 2006) : proceedings ... of ... the conferences held October 17-19, 2006, in San Diego, California, U.S.A. and September 26-27, 2006, at the University of Tokyo, Tokyo, Japan /
AMC 2006
editors: Stephen W. Russell ... [et al.]
- Warrendale, Pa. : Materials Research Society, c2007
- xxii, 693 p. : ill. ; 24 cm.
- Materials Research Society conference proceedings .
- Materials Research Society conference proceedings .
This combined Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."--T.p.
Includes bibliographical references and indexes
9781558999473 1558999477
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses
This combined Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."--T.p.
Includes bibliographical references and indexes
9781558999473 1558999477
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses