Physics of radio-frequency plasmas /
Chabert, Pascal, 1969-
Physics of radio-frequency plasmas / Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University - Cambridge, UK : Cambridge University Press, 2011 - viii, 385 pages : ill. ; 26 cm.
Includes bibliographical references and index
Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index
9780521763004 0521763002
Low temperature plasmas
Radio frequency
Physics of radio-frequency plasmas / Pascal Chabert, CNRS, Nicholas Braithwaite, The Open University - Cambridge, UK : Cambridge University Press, 2011 - viii, 385 pages : ill. ; 26 cm.
Includes bibliographical references and index
Machine generated contents note: 1. Introduction; 2. Plasma dynamics and equilibrium; 3. Bounded plasmas; 4. Radiofrequency sheaths; 5. Single frequency capacitively-coupled plasmas; 6. Multi-frequency capacitively-coupled plasmas; 7. Inductively-coupled plasmas; 8. Helicon plasmas; 9. Real plasmas; 10. Electrical measurements; Index
9780521763004 0521763002
Low temperature plasmas
Radio frequency