Control technologies for emerging micro and nanoscale systems /
Control technologies for emerging micro and nanoscale systems /
editor by Evangelos Eleftheriou and S.O. Reza Moheimani
- Berlin,Germany ; Springer Verlag, 2011
- xv, 287 p. : ill. (some col.) ; 24 cm.
- Lecture notes in control and information sciences, 413 0170-8643 ; .
- Lecture notes in control and information sciences ; 413 .
Includes index
9783642221729 (alk. paper) 3642221726 (alk. paper)
Microelectromechanical systems
Automatic control
Microscopy
Includes index
9783642221729 (alk. paper) 3642221726 (alk. paper)
Microelectromechanical systems
Automatic control
Microscopy