Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A. /
Chemical perspectives of microelectronic materials : symposium held November 30-December 2, 1988, Boston, Massachusetts, U.S.A. /
editors, MÃhal E. Gross, Joseph M. Jasinski, John T. Yates, Jr.
- Pittsburgh, Pa. : Materials Research Society, c1989
- xv, 642 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 131 .
- Materials Research Society symposia proceedings ; v. 131 .
Includes bibliographical references and indexes
9781558990043 1558990046
Microelectronics--Materials--Congresses
Semiconductors--Congresses
Surface chemistry--Congresses
Includes bibliographical references and indexes
9781558990043 1558990046
Microelectronics--Materials--Congresses
Semiconductors--Congresses
Surface chemistry--Congresses