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Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. /

Materials issues and modeling for device nanofabrication : symposia held November 29-December 2, 1999, Boston, Massachusetts, U.S.A. / editors by Lhadi Merhari ... [et al.] - Warrendale, PA : Materials Research Society, c2000 - xiii, 340 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 584 . - Materials Research Society symposium proceedings .

Includes bibliographical references and index

ISBN: 9781558994928 1558994920

Subjects--Topical Terms:
Integrated circuits--Design and construction--Congresses
Nanotechnology--Congresses
Integrated circuits--Materials--Congresses
Molecular electronics--Congresses
Microlithography--Congresses

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