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Microelectromechanical systems, materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, USA /

Microelectromechanical systems, materials and devices : symposium held November 26-28, 2007, Boston, Massachusetts, USA / editors by David A. LaVan ... [et al.] - Warrendale, PA : Materials Research Society, c2008 - xiv, 325 p. : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 1052 . - Materials Research Society symposium proceedings .

Includes bibliographical references and index

ISBN: 9781558999909 1558999906

Subjects--Topical Terms:
Microelectromechanical systems--Materials--Congresses
Microelectromechanical systems--Congresses

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